Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152238 | Semiconductor processing stage profiler jig | Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Sheng-Hsiang Chuang, Cheng-Hung Chen | 2021-10-19 |
| 11120539 | Topological scanning method and system | Sheng-Hsiang Chuang, Jiao-Rou Liao, Shou-Wen Kuo, Jiun-Rong Pai, Hsu-Shui Liu | 2021-09-14 |
| 10971386 | Device positioning using sensors | Yan-Han CHEN, Ren-Hau Wu, Cheng-Hung Chen, Feng-Kuang Wu, Hsu-Shui Liu +2 more | 2021-04-06 |
| 10889097 | Wafer debonding system and method | Chang-Chen Tsao, Kuo-Liang Lu, Ru-Liang Lee, Sheng-Hsiang Chuang, Yu-Hung Cheng +1 more | 2021-01-12 |