Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11171065 | Automated inspection tool | Chia-Han Lin, Chien-Fa Lee, Hsu-Shui Liu, Sheng-Hsiang Chuang, Surendra Kumar Soni +9 more | 2021-11-09 |
| 11158531 | Wafer cassette handling apparatus and operating method thereof | Tsung-Sheng Kuo, Hsuan Lee, Hsu-Shui Liu, Chih-Hung Huang, Yang-Ann Chu | 2021-10-26 |
| 11152238 | Semiconductor processing stage profiler jig | Cheng-Kang Hu, Hsu-Shui Liu, Shou-Wen Kuo, Sheng-Hsiang Chuang, Cheng-Hung Chen | 2021-10-19 |
| 11120539 | Topological scanning method and system | Sheng-Hsiang Chuang, Jiao-Rou Liao, Cheng-Kang Hu, Shou-Wen Kuo, Hsu-Shui Liu | 2021-09-14 |
| 11004720 | System and method for ring frame cleaning and inspection | Chien-Fa Lee, Hsu-Shui Liu, Shou-Wen Kuo, Jian-Hung Chen, Meng-Chen Lin +3 more | 2021-05-11 |
| 10991625 | Automated transfer and drying tool for process chamber | Tsung-Sheng Kuo, Hsu-Shui Liu, Shou-Wen Kuo, Yang-Ann Chu | 2021-04-27 |
| 10971386 | Device positioning using sensors | Yan-Han CHEN, Cheng-Kang Hu, Ren-Hau Wu, Cheng-Hung Chen, Feng-Kuang Wu +2 more | 2021-04-06 |