Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158531 | Wafer cassette handling apparatus and operating method thereof | Tsung-Sheng Kuo, Hsuan Lee, Hsu-Shui Liu, Jiun-Rong Pai, Chih-Hung Huang | 2021-10-26 |
| 10991625 | Automated transfer and drying tool for process chamber | Tsung-Sheng Kuo, Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo | 2021-04-27 |