Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11158531 | Wafer cassette handling apparatus and operating method thereof | Hsuan Lee, Hsu-Shui Liu, Jiun-Rong Pai, Chih-Hung Huang, Yang-Ann Chu | 2021-10-26 |
| 10991625 | Automated transfer and drying tool for process chamber | Hsu-Shui Liu, Jiun-Rong Pai, Shou-Wen Kuo, Yang-Ann Chu | 2021-04-27 |
| 10964574 | System for automatic sending cassette pod | — | 2021-03-30 |