Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11177180 | Profile control of a gap fill structure | Wan-Yao Wu, Ming-Chang Wen | 2021-11-16 |
| 11158725 | Fin structure of fin field effect transistor | Feng Yuan, Hung-Ming Chen, Tsung-Lin Lee, Clement Hsingjen Wann | 2021-10-26 |
| 11031501 | Isolation structure having different distances to adjacent FinFET devices | Ming-Ching Chang, Shu-Yuan Ku | 2021-06-08 |
| 10991628 | Etch stop layer between substrate and isolation structure | Ming-Chang Wen, Hsien-Chin Lin, Hung-Kai Chen | 2021-04-27 |
| 10978351 | Etch stop layer between substrate and isolation structure | Ming-Chang Wen, Hsien-Chin Lin, Hung-Kai Chen | 2021-04-13 |
| 10930564 | Metal gate structure cutting process | I-Wen Wu, Chen-Ming Lee, Fu-Kai Yang, Mei-Yun Wang, Ching-Feng Fu +1 more | 2021-02-23 |