Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189467 | Apparatus and method of attaching pad on edge ring | Jin-Uk Park, Sun Ho Kim, Sung Jin Kim, Jong-Geug Kim, Kyu-Chul Shim +4 more | 2021-11-30 |
| 10971382 | Loadlock module and semiconductor manufacturing apparatus including the same | Kwang-Nam Kim, Byeong-Hee Kim, Jeongryul Kim, Hae-Joong Park, Jong-Woo Sun +3 more | 2021-04-06 |
| 10955693 | Display device and method of fabricating the same | Kang Bin Yi, Dong Rak Ko, Sung Ho Kim, Eun Ji Seo, Sung Hun SON +4 more | 2021-03-23 |