Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189467 | Apparatus and method of attaching pad on edge ring | Jin-Uk Park, Sun Ho Kim, Sung Jin Kim, Kyu-Chul Shim, Ji-Hoon Yeo +4 more | 2021-11-30 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11189467 | Apparatus and method of attaching pad on edge ring | Jin-Uk Park, Sun Ho Kim, Sung Jin Kim, Kyu-Chul Shim, Ji-Hoon Yeo +4 more | 2021-11-30 |