Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11175302 | Apparatus and method for automated analysis | Makoto Asakura, Yasushi Kondo, Kouichi Saika, Takeshi Muranaka, Mine Yamashita +1 more | 2021-11-16 |
| 11143964 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Takeharu Ishii, Tomohiro Matsuo | 2021-10-12 |
| 11107698 | Substrate treating method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Tomohiro Matsuo +1 more | 2021-08-31 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Koji Kaneyama | 2021-03-23 |
| 10941492 | Substrate treating method | Yuji Tanaka, Chisayo Nakayama, Masahiko Harumoto, Masaya Asai, Tomohiro Matsuo +1 more | 2021-03-09 |
| 10915025 | Substrate treating method | Yuji Tanaka, Tomohiro Matsuo, Takeharu Ishii | 2021-02-09 |
| 10900126 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Chisayo Nakayama, Masahiko Harumoto, Masaya Asai, Tomohiro Matsuo +1 more | 2021-01-26 |