Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11139192 | Substrate treating apparatus and substrate transporting method | Joji Kuwahara | 2021-10-05 |
| 11004702 | Film processing unit and substrate processing apparatus | Yuji Tanaka, Masaya Asai, Masahiko Harumoto | 2021-05-11 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto | 2021-03-23 |