Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107698 | Substrate treating method | Chisayo Nakayama, Yuji Tanaka, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-08-31 |
| 11004702 | Film processing unit and substrate processing apparatus | Yuji Tanaka, Masaya Asai, Koji Kaneyama | 2021-05-11 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Chisayo Nakayama, Yuji Tanaka, Masaya Asai, Yasuhiro Fukumoto, Koji Kaneyama | 2021-03-23 |
| 10941492 | Substrate treating method | Yuji Tanaka, Chisayo Nakayama, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-03-09 |
| 10900126 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Chisayo Nakayama, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-01-26 |