Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107698 | Substrate treating method | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-08-31 |
| 10955745 | Exposure device, substrate processing apparatus, exposure method and substrate processing method | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Koji Kaneyama | 2021-03-23 |
| 10941492 | Substrate treating method | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-03-09 |
| 10900126 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto, Tomohiro Matsuo +1 more | 2021-01-26 |