Issued Patents 2021
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152242 | Substrate treating apparatus and method for controlling substrate treating apparatus | Seiji Murai | 2021-10-19 |
| 11152233 | Substrate treating apparatus and substrate treating method | Yukihiko Inagaki, Seiji Murai | 2021-10-19 |
| 11139192 | Substrate treating apparatus and substrate transporting method | Koji Kaneyama | 2021-10-05 |
| 11127613 | Substrate treating apparatus and substrate transporting method | — | 2021-09-21 |
| 11101156 | Substrate treating apparatus | Yukihiko Inagaki, Seiji Murai | 2021-08-24 |
| 11075101 | Indexer apparatus, substrate treating apparatus, method for controlling indexer apparatus, and method for controlling substrate treating apparatus | Seiji Murai | 2021-07-27 |
| 11037808 | Substrate processing apparatus and substrate processing method | — | 2021-06-15 |