Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152233 | Substrate treating apparatus and substrate treating method | Yukihiko Inagaki, Joji Kuwahara | 2021-10-19 |
| 11152242 | Substrate treating apparatus and method for controlling substrate treating apparatus | Joji Kuwahara | 2021-10-19 |
| 11101156 | Substrate treating apparatus | Joji Kuwahara, Yukihiko Inagaki | 2021-08-24 |
| 11075101 | Indexer apparatus, substrate treating apparatus, method for controlling indexer apparatus, and method for controlling substrate treating apparatus | Joji Kuwahara | 2021-07-27 |