Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11143964 | Substrate treating method and apparatus used therefor | Yasuhiro Fukumoto, Yuji Tanaka, Tomohiro Matsuo | 2021-10-12 |
| 11107698 | Substrate treating method | Chisayo Nakayama, Yuji Tanaka, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto +1 more | 2021-08-31 |
| 10941492 | Substrate treating method | Yuji Tanaka, Chisayo Nakayama, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto +1 more | 2021-03-09 |
| 10915025 | Substrate treating method | Yasuhiro Fukumoto, Yuji Tanaka, Tomohiro Matsuo | 2021-02-09 |
| 10900126 | Substrate treating method and apparatus used therefor | Yuji Tanaka, Chisayo Nakayama, Masahiko Harumoto, Masaya Asai, Yasuhiro Fukumoto +1 more | 2021-01-26 |