Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11203094 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | Hiromi Murachi, Ryuichi Yoshida, Koji Nishiyama, Chikara Sagae | 2021-12-21 |
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-02-16 |