Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-05-11 |
| 10919436 | Vehicle control system and column traveling system | Hideaki Kikuchi, Tatsuya Shiratori | 2021-02-16 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita, Hidetoshi Sagawa +1 more | 2021-02-16 |
| 10923351 | Coating method | Shogo Yoshida, Ryuichi Yoshida | 2021-02-16 |