Pumping apparatus, treatment solution supplying device, and substrate treating apparatus

Assignee

• Screen Holdings Co.

Inventors

• Junki Nishimura (4 patents)
• Hiroyuki Ogura (60 patents)
• Masahito KASHIYAMA (17 patents)
• Toru Momma (12 patents)
• Shoji Kirita (5 patents)
• Hidetoshi Sagawa (6 patents)
• Shogo Yoshida (18 patents)

View full patent text on Google Patents →