Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11000783 | Pumping apparatus, treatment solution supplying device, and substrate treating apparatus | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita +1 more | 2021-05-11 |
| 10920764 | Pumping apparatus, treatment solution supplying device, substrate treating apparatus, liquid draining method, and liquid replacing method | Junki Nishimura, Hiroyuki Ogura, Masahito KASHIYAMA, Toru Momma, Shoji Kirita +1 more | 2021-02-16 |