Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11203094 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | Hiromi Murachi, Ryuichi Yoshida, Toru Momma, Chikara Sagae | 2021-12-21 |
| 11114316 | Substrate treating apparatus | Kota KABUNE, Masahito KASHIYAMA, Yasuo Takahashi, Chiho Harayama | 2021-09-07 |
| 11004706 | Substrate treating apparatus | — | 2021-05-11 |
| 10985008 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | — | 2021-04-20 |