Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11203094 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | Ryuichi Yoshida, Koji Nishiyama, Toru Momma, Chikara Sagae | 2021-12-21 |