Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195731 | Substrate processing device, substrate processing method, and substrate processing system | Masafumi Inoue, Hiroki Taniguchi, Takayoshi Tanaka, Yuta Nakano | 2021-12-07 |
| 11031235 | Substrate processing apparatus | Hiromichi KABA, Tomomi Iwata, Toru Edo, Kunio Yamada | 2021-06-08 |