Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031235 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Tomomi Iwata, Kunio Yamada | 2021-06-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031235 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Tomomi Iwata, Kunio Yamada | 2021-06-08 |