Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031235 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Toru Edo, Kunio Yamada | 2021-06-08 |
| 10910213 | Substrate processing apparatus and substrate processing method | Tetsuya EMOTO, Atsuro Eitoku | 2021-02-02 |