Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195731 | Substrate processing device, substrate processing method, and substrate processing system | Masafumi Inoue, Akihiko TAKI, Hiroki Taniguchi, Yuta Nakano | 2021-12-07 |
| 11121008 | Method of processing substrate and substrate processing apparatus | Akira OATO | 2021-09-14 |
| 11064598 | Static eliminator and static eliminating method | Seiji ANO | 2021-07-13 |