Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195731 | Substrate processing device, substrate processing method, and substrate processing system | Masafumi Inoue, Akihiko TAKI, Hiroki Taniguchi, Takayoshi Tanaka | 2021-12-07 |
| 11190159 | Noise filter | Honoka Asano, Shu Sato | 2021-11-30 |
| 11112189 | Cold plate and manufacturing method of cold plate | Yuji Saito | 2021-09-07 |
| 11030010 | Processing storage management request based on current and threshold processor load using request information | Yasuhiro Nakaaki | 2021-06-08 |