Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong +2 more | 2021-04-20 |
| 10916549 | Semiconductor devices including enlarged contact hole and methods of forming the same | Yoon-Ho Son, Jae Uk Shin, Im-Soo Park, Sung-Yoon Chung | 2021-02-09 |
| 10910237 | Operating method for wet etching system and related system | Sang Hoon Jeong, Dong Ha Kim, Tae Heon Kim, Chang-Sup Mun, Woo-Gwan Shim +2 more | 2021-02-02 |