Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126092 | Methods for determining an approximate value of a processing parameter at which a characteristic of the patterning process has a target value | Wenjin Huang, Bruno La Fontaine | 2021-09-21 |
| 11029359 | Failure detection and classsification using sensor data and/or measurement data | Tomonori Honda, Lakshmikar Kuravi | 2021-06-08 |
| 11022642 | Semiconductor yield prediction | Jeffrey Drue David, Tomonori Honda | 2021-06-01 |