Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11126092 | Methods for determining an approximate value of a processing parameter at which a characteristic of the patterning process has a target value | Lin Lee Cheong, Wenjin Huang | 2021-09-21 |
| 10908515 | Method and apparatus for pattern fidelity control | Tanbir HASAN, Vivek Jain, Stefan Hunsche | 2021-02-02 |