Issued Patents 2021
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183435 | Endpointing detection for chemical mechanical polishing based on spectrometry | Dominic J. Benvegnu, Boguslaw A. Swedek | 2021-11-23 |
| 11029673 | Generating robust machine learning predictions for semiconductor manufacturing processes | Tomonori Honda, Rohan D. Kekatpure | 2021-06-08 |
| 11022642 | Semiconductor yield prediction | Tomonori Honda, Lin Lee Cheong | 2021-06-01 |
| 10948900 | Display of spectra contour plots versus time for semiconductor processing system control | Harry Q. Lee, Dominic J. Benvegnu, Boguslaw A. Swedek | 2021-03-16 |