Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Hassan G. Iravani, Denis Ivanov, Boguslaw A. Swedek, Shih-Haur Shen +1 more | 2021-05-04 |
| 10948900 | Display of spectra contour plots versus time for semiconductor processing system control | Jeffrey Drue David, Dominic J. Benvegnu, Boguslaw A. Swedek | 2021-03-16 |
| 10898986 | Chattering correction for accurate sensor position determination on wafer | Kun Xu, Jimin Zhang | 2021-01-26 |