Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11183435 | Endpointing detection for chemical mechanical polishing based on spectrometry | Jeffrey Drue David, Boguslaw A. Swedek | 2021-11-23 |
| 11100628 | Thickness measurement of substrate using color metrology | Nojan Motamedi, Boguslaw A. Swedek, Martin A. Josefowicz | 2021-08-24 |
| 11072050 | Polishing pad with window and manufacturing methods thereof | Boyi Fu, Sivapackia Ganapathiappan, Daniel Redfield, Rajeev Bajaj, Ashwin CHOCKALINGAM +4 more | 2021-07-27 |
| 11017524 | Thickness measurement of substrate using color metrology | — | 2021-05-25 |
| 10948900 | Display of spectra contour plots versus time for semiconductor processing system control | Jeffrey Drue David, Harry Q. Lee, Boguslaw A. Swedek | 2021-03-16 |