Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Hassan G. Iravani, Boguslaw A. Swedek, Shih-Haur Shen, Harry Q. Lee +1 more | 2021-05-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10994389 | Polishing apparatus using neural network for monitoring | Kun Xu, Hassan G. Iravani, Boguslaw A. Swedek, Shih-Haur Shen, Harry Q. Lee +1 more | 2021-05-04 |