Issued Patents 2021
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099483 | Euv lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Michael Binnard | 2021-08-24 |
| 11061338 | High-resolution position encoder with image sensor and encoded target pattern | Jonathan K. Wells, Paul Derek Coon, Matthew Rosa, Johnathan Agustin Marquez, Michael Binnard +3 more | 2021-07-13 |
| 11054745 | Illumination system with flat 1D-patterned mask for use in EUV-exposure tool | David M. Williamson | 2021-07-06 |
| 10928187 | Compensation for Goos-Hanchen error in autofocus systems | Eric Peter Goodwin | 2021-02-23 |
| 10890849 | EUV lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Michael Binnard | 2021-01-12 |