Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099007 | Test of operational status of a digital scanner during lithographic exposure process | — | 2021-08-24 |
| 10928187 | Compensation for Goos-Hanchen error in autofocus systems | Daniel Gene Smith | 2021-02-23 |
| 10921718 | Two-dimensional position encoder | Zhiqiang Liu, Goldie Goldstein | 2021-02-16 |