Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11099483 | Euv lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Daniel Gene Smith | 2021-08-24 |
| 11075573 | Power minimizing controller for a stage assembly | Neyram Hemati | 2021-07-27 |
| 11067900 | Dense line extreme ultraviolet lithography system with distortion matching | — | 2021-07-20 |
| 11061338 | High-resolution position encoder with image sensor and encoded target pattern | Jonathan K. Wells, Paul Derek Coon, Matthew Rosa, Johnathan Agustin Marquez, Steven Douglas Slonaker +3 more | 2021-07-13 |
| 10890849 | EUV lithography system for dense line patterning | Donis Flagello, David M. Williamson, Stephen P. Renwick, Daniel Gene Smith | 2021-01-12 |
| 10884344 | Positioning system using surface pattern recognition and interpolation | Paul Derek Coon, Jonathan K. Wells, Matthew Rosa | 2021-01-05 |