Issued Patents 2021
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2021-06-15 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11037758 | In-situ plasma cleaning of process chamber components | Kevin Anglin, William Davis Lee, Peter F. Kurunczi, Ryan Downey, Jay T. Scheuer +1 more | 2021-06-15 |