Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10957532 | Method and apparatus for deposition of low-k films | Ning Li, Mihaela Balseanu, Li-Qun Xia, Bhaskar Jyoti Bhuyan, Mark Saly | 2021-03-23 |
ZS
Zhelin Sun
Overall (2021): #188,932 of 548,734Top 35%
1
Patents 2021