Issued Patents 2021
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11186771 | Etching solution for selectively removing silicon nitride during manufacture of a semiconductor device | Yi-Chia Lee | 2021-11-30 |
| 11180697 | Etching solution having silicon oxide corrosion inhibitor and method of using the same | Yi-Chia Lee, Chung-Yi Chang | 2021-11-23 |
| 11175587 | Stripper solutions and methods of using stripper solutions | Jhih Kuei Ge, Yi-Chia Lee, Chi-Hsien Kuo | 2021-11-16 |
| 11035044 | Etching solution for tungsten and GST films | Laisheng Sun, Yi-Chia Lee, Tianniu Chen, Gang C. Han-Adebekun | 2021-06-15 |
| 11017995 | Composition for TiN hard mask removal and etch residue cleaning | Chao-Hsiang Chen, Yi-Chia Lee, Chung-Yi Chang | 2021-05-25 |
| 10954480 | Compositions and methods for preventing collapse of high aspect ratio structures during drying | Jhih Kuei Ge, Yi-Chia Lee, Tianniu Chen | 2021-03-23 |
| 10934484 | Etching solution for selectively removing silicon-germanium alloy from a silicon-germanium/ germanium stack during manufacture of a semiconductor device | Yi-Chia Lee | 2021-03-02 |
| 10934485 | Etching solution for selectively removing silicon over silicon-germanium alloy from a silicon-germanium/ silicon stack during manufacture of a semiconductor device | Yi-Chia Lee, Andrew J. Adamczyk | 2021-03-02 |