Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10950475 | Method and apparatus for processing a substrate using non-contact temperature measurement | Ananthkrishna Jupudi, Cheng-Hsiung Tsai, Yueh Sheng Ow, Preetham Rao, Ribhu Gautam +1 more | 2021-03-16 |