Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11047035 | Protective yttria coating for semiconductor equipment parts | Ramesh Gopalan, Yixing Lin, Siamak Salimian, Yikai Chen, Kevin A. PAPKE | 2021-06-29 |
| 10883972 | Coating tester using gas sensors | Mats Larsson, Kevin A. PAPKE | 2021-01-05 |