Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107675 | CVD Mo deposition by using MoOCl4 | Thomas H. Baum, Philip S. H. Chen, Robert Wright, Jr., Bryan C. Hendrix, Richard Assion | 2021-08-31 |
| 11039527 | Air leak detection in plasma processing apparatus with separation grid | Xinliang Lu, Shawming Ma, Hua Chung | 2021-06-15 |