Issued Patents 2021
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11107675 | CVD Mo deposition by using MoOCl4 | Thomas H. Baum, Philip S. H. Chen, Robert Wright, Jr., Shuang Meng, Richard Assion | 2021-08-31 |
| 10895010 | Solid precursor-based delivery of fluid utilizing controlled solids morphology | John M. Cleary, Jose I. Arno, Donn K. Naito, Scott L. Battle, John N. Gregg +2 more | 2021-01-19 |
| 10895347 | Heat transfer to ampoule trays | Scott L. Battle, John N. Gregg | 2021-01-19 |