Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998183 | Substrate cleaning apparatus, substrate cleaning system, substrate cleaning method and memory medium | Miyako Kaneko, Takehiko Orii, Masami Yamashita, Itaru Kanno | 2021-05-04 |
| 10964606 | Film forming system, film forming method, and computer storage medium | Masashi Enomoto | 2021-03-30 |