Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036140 | Substrate processing apparatus, substrate processing method and recording medium | Shinichiro KAWAKAMI, Hiroshi Mizunoura, Yohei SANO, Takashi Yamauchi | 2021-06-15 |
| 10964606 | Film forming system, film forming method, and computer storage medium | Satoru Shimura | 2021-03-30 |