Issued Patents 2021
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11036140 | Substrate processing apparatus, substrate processing method and recording medium | Shinichiro KAWAKAMI, Yohei SANO, Takashi Yamauchi, Masashi Enomoto | 2021-06-15 |
| 10955743 | Substrate processing apparatus, substrate processing method and computer-readable recording medium | Yohei SANO, Shinichiro KAWAKAMI | 2021-03-23 |