Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11203094 | Substrate cleaning device, substrate processing apparatus, substrate cleaning method and substrate processing method | Hiromi Murachi, Koji Nishiyama, Toru Momma, Chikara Sagae | 2021-12-21 |
| 10923351 | Coating method | Shogo Yoshida, Hiroyuki Ogura | 2021-02-16 |