Issued Patents 2021
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145485 | Multiple electron beams irradiation apparatus | Kazuhiko Inoue, Atsushi Ando, John G. Hartley | 2021-10-12 |
| 11139138 | Multiple electron beams irradiation apparatus | Kazuhiko Inoue, Atsushi Ando, John G. Hartley | 2021-10-05 |
| 10998162 | Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method | Nobuo Miyamoto | 2021-05-04 |
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Takanao Touya, Hirofumi Morita | 2021-05-04 |
| 10950410 | Multiple electron beam inspection apparatus with through-hole with spiral shape | Kazuhiko Inoue, Atsushi Ando | 2021-03-16 |
| 10886102 | Multiple electron beam irradiation apparatus, multiple electron beam irradiation method, and multiple electron beam inspection apparatus | Kazuhiko Inoue, Steven D. Golladay | 2021-01-05 |