Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11145485 | Multiple electron beams irradiation apparatus | Kazuhiko Inoue, Atsushi Ando, Munehiro Ogasawara | 2021-10-12 |
| 11139138 | Multiple electron beams irradiation apparatus | Kazuhiko Inoue, Atsushi Ando, Munehiro Ogasawara | 2021-10-05 |
| 10937623 | Deflector for multiple electron beams and multiple beam image acquiring apparatus | — | 2021-03-02 |