Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Takanao Touya, Munehiro Ogasawara | 2021-05-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998164 | Charged particle beam writing apparatus and charged particle beam writing method | Takanao Touya, Munehiro Ogasawara | 2021-05-04 |