HM

Hirofumi Morita

NT Nuflare Technology: 1 patents #24 of 86Top 30%
Overall (2021): #433,520 of 548,734Top 80%
1
Patents 2021

Issued Patents 2021

Patent #TitleCo-InventorsDate
10998164 Charged particle beam writing apparatus and charged particle beam writing method Takanao Touya, Munehiro Ogasawara 2021-05-04