Issued Patents 2021
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998162 | Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method | Munehiro Ogasawara | 2021-05-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10998162 | Charged-particle beam apparatus, charged-particle beam writing apparatus, and charged-particle beam controlling method | Munehiro Ogasawara | 2021-05-04 |